Preparation of Flat and Smooth Copper Surface by Jet Electrochemical Machining and Electrochemical Polishing

Electrochemical Polishing of Patterned Copper Films

For decades Electrochemical Polishing (ECP) has been used for surface polishing of bulk metal materials such as copper and stainless steel. However, it was found very challenging to planarize patterned copper films electrodeposited on silicon wafers. This work studied the mechanisms of ECP, the surface profiles and ECP effects of copper bulk and films in various electrolyte solutions. Satisfied...

Laser Drilling Assisted with Jet Electrochemical Machining

Electrochemical Preparation and Characterization of Mn5O8 Nanostructures

Electrochemical synthesis followed by heat-treatment is a facile and easy method for preparation of nanostructured metal oxides. Herein we report nanostructured Mn5O8 prepared through pulse cathodic deposition followed by heat-treatment for the first time. For the preparation of Mn5O8 nanorods, pulse cathodic electrodeposition was first done from 0.005M Mn(NO3)2 at the current density of 5 mA c...

Prediction of Surface in Machining by Flat and Spherical Surface Tools

In this paper, the profile of surfaces machined using end mills with flat and ball end tools in modeled. The real kinematics of the tool motion, the static deflection and the run out of the tool are included in the model. The cutting forces are calculated using a semi-empirical method based on orthogonal to oblique conversion of cutting coefficients. The thickness of the uncut chip is used as t...

Preparation of Coated Microtools for Electrochemical Machining Applications

Coated tools have improved the performance of both traditional and nontraditional machining processes and have resulted in higher material removal, better surface finish, and increased wear resistance. However, a study on the performance of coated tools in micromachining has not yet been adequately conducted. One possible reason is the difficulties associated with the preparation of coated micr...